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Tribology of Diamond-like Carbon Films
  • Language: en
  • Pages: 673

Tribology of Diamond-like Carbon Films

This book highlights some of the most important structural, chemical, mechanical and tribological characteristics of DLC films. It is particularly dedicated to the fundamental tribological issues that impact the performance and durability of these coatings. The book provides reliable and up-to-date information on available industrial DLC coatings and includes clear definitions and descriptions of various DLC films and their properties.

Laser Surface Processing and Characterization
  • Language: en
  • Pages: 552

Laser Surface Processing and Characterization

  • Type: Book
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  • Published: 1992-03-09
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  • Publisher: Elsevier

The contributions in this volume reflect not only the growing understanding of the underlying mechanisms controlling the various reactions in laser surface processing, but also the potential of several developing applications of direct processing. The most notable trend in the field currently is the technique of laser ablation, which is reported in almost a quarter of the papers in this volume. Whilst by no means a new phenomenon, attention has until recent years remained in the area of lithography and UV-sensitive materials. The growth in interest lies in the use of the technique to grow multi-component thin films and multi-layers. A number of papers on the topic of process diagnostics and in-situ measurements are also included. The theme of these annual meetings is centred around the physical and chemical modification of thin films and surfaces induced by the action of photon, ion, neutral, or electron beams in a variety of environments. Consequently these proceedings provide a comprehensive and unified presentation of the latest developments in this field.

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
  • Language: en
  • Pages: 625

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to ot...

Beam Processing and Laser Chemistry
  • Language: en
  • Pages: 482

Beam Processing and Laser Chemistry

  • Type: Book
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  • Published: 1990-02-01
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  • Publisher: Elsevier

This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.

Proceedings of the Eighth International Conference on Chemical Vapor Deposition
  • Language: en
  • Pages: 844
Reduced Thermal Processing for ULSI
  • Language: en
  • Pages: 444

Reduced Thermal Processing for ULSI

As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first ar...

Laser-assisted Fabrication of Thin Films and Microstructures
  • Language: en
  • Pages: 384

Laser-assisted Fabrication of Thin Films and Microstructures

  • Type: Book
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  • Published: 1994
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  • Publisher: Unknown

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Advanced Engineering and Materials (ICMEM)
  • Language: en
  • Pages: 813

Advanced Engineering and Materials (ICMEM)

Selected, peer reviewed papers from the 2013 International Conference on Mechanical Engineering and Materials (ICMEM 2013), January 27-28, 2013, Sanya, China

Chemical News and Journal of Industrial Science
  • Language: en
  • Pages: 312

Chemical News and Journal of Industrial Science

  • Type: Book
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  • Published: 1882
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  • Publisher: Unknown

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